INFICON TRANSPECTOR® CPM 3

 Description

Performance, Reliability, and Versatility

INFICON Transpector CPM has been the market-leading Residual Gas Analyzer (RGA) process monitoring system in the semiconductor industry for over a decade. Now Transpector CPM 3 provides industry leading measurement speed and sensitivity through a field proven pumping and inlet system integrated with a new sensor and electronics. Transpector CPM 3 is the ideal RGA process monitor for new and established semiconductor processes such as ALD, CVD, PVD, and Etch.

Transpector CPM 3 provides proven return on investment to our partners through:

• Industry Leading Measurement Technology
• Robust and Adaptive Architecture
• Ease of Maintenance
• Superior Product Support

Features

• Residual Gas Analyzer for ALD, Etch, CVD and 300 mm Degas—enables real-time process monitoring and analysis
• ALD-Ready with 1.8 ms per point (555 points per second) measurement speed
• Field-proven durability and reliability in the most demanding CVD and Etch applications
• Application Integration—Transpector CPM becomes a powerful process monitoring and diagnostics tool when integrated with FabGuard software and supported by INFICON world-class applications experts
• Compact size—allows for easy integration into production semiconductor equipment
• Hexblock™ with up to three pressure inlets and reduced surface area to minimize surface reactions and response times
• Capacitance Diaphragm Gauge (CDG)—CDG allows user to monitor the process pressure and automatically protect the system from pressure excursions
• Automated calibration—ensures long-term data stability and accuracy for sensor to sensor and tool to tool chamber matching

Specifications

Consumables

Spare Parts

100 AMU CPM

200 AMU CPM

300 AMU CPM